Analysis Service Overview

  • Cleanroom Technologies & Controlled Environments
ICP-MS Analysis of water samples
ICP-MS Analysis of water samples
Micro emmision chamber

Analysis Service Overview

Our modern cleanroom trace analysis area has the latest analytical equipment that is ideal for trace analysis meaning we can attain detection limits and degrees of precision that few laboratories worldwide can offer.

Rubén López Trigo
Head of Trace Analysis

Phone: +49 711 8804-1727

Mobil: +49 152 54749991

Fax: +49 711 8804-2117

Chemical Analysis for Organic Contamination

Our trace analysis area is equipped with state-of-the-art analytical equipment and calibrated instruments. All analytical tests are conducted using standardized or in-house procedures. We provide gas chromatography with mass spectrometry (GC / MS) equipment for the quantification and identification of organic compounds and an online TOC analyzer for the determination of organic compounds in ultrapure water.

Thermal Desorption Gas Chromatography coupled with Mass Spectrometry (TD - GC / MS)

Gas chromatography-mass spectrometry coupled with a thermal desorption unit is a universal method for the identification and quantification of a wide range of volatile as well as semi-volatile organic compounds in complex chemical environments. Air samples are collected on thermodesorption tubes packed with one or more solid adsorbents. Within a semi-quantitative screening analysis total organic compound quantities will be reported as well as the most abundant peaks can be identified by means of mass spectra libraries.

Substance Analytes Sample Type
Total VOC Volatile organic compounds ≥ C6 Ambient and indoor air, CDA,
outgassing tests of cleanroom
materials, products and components chemical filter

e.g. Tenax TA, Carbotrap 300
Total SVOC Semi volatile organic compounds ≥ C16
Organic amines Aliphatic and aromatic amines, amino alcohols, amides
Special individual compounds PGMEA, ethyl lactate
Refactory compounds Organic compounds with heteroatoms (except N,O):
e.g. SI, S, P, F, CI
Typical limits of quantilation (LOQ)* 0.01 - 0.1μg / m3 in air

* The LOQ in air can vary depending on the sampling time and rate and will be adjusted corresponding to the project requirements. LOQ corresponds to reference standard n-Hexadecane.

Total Organic Carbon (TOC)

Our highly-sensitive on-line TOC analyzer provides continuous monitoring of organics in ultrapure water and is able to deliver high-quality results down to a TOC concentration of 0.1 ppb. It enables quick and accurate measurements on-site to ensure the relevant demands for water quality. The ana-lyzer will be installed directly at the place of measurement and the concentrations can be recorded directly on the device.

Individual samples, e.g. aqueous extracts, can be filled in samp le vials and analyzed in a special offline mode.

Analysis Analysis medium Measuring range
TOC ultrapure water (UPW) 0.1 - 2,500 ppb

Chemical Trace- Analysis for Metals and Ions

For the determination of elemental contamination in the ppt range, ICP-MS is the method of choice. Ion chromatography is applied if the concentration of ionic species (anions, cations) in water is in focus.

Inductively Coupled Plasma Mass Spectrometry (ICP-MS)

Inductively coupled plasma mass spectrometry (ICP - MS) is an elemental analysis technique for quantitative trace element analysis. It can detect almost all elements of the periodic table.

Our ICP - MS system has an excellent sensitivity and can operate down to sub-ppt limits, lower than most other analytical methods.

Substance class Analytes Sample type
Trace elements and dopants Au, Ag, Al, B, Ba, Ca, Co, Cr,
Cu, Fe, Ga, Ge, Hf, K, Li, Mo,
Mg, Mn, Na, Ni, P, Pt, Sr, Ti, Zn
• Ultrapure water (UPW)
• UPW impinger for air samples
• Diluted aqeous samples
Typical limits of quantitation
1 - 10 ng / L in UPW
0.01 - 0.05 μg / m³ in air

* The LOQ in air can vary depending on the sampling time and rate and will be adjusted corresponding to the project requirements. Lower LOQ < 1 ppt in UPW are available on request.

Ion Chromatography (IC)

Ion chromatography is the ideal method for analyzing anions, cations and other polar substances in aqueous media. A specific instrument design allows the simultaneous analysis of anions and cations from the same sample. Using a specific pre-concentration technique enables ultra-trace analysis down to the lower ppt-range.

Substance Analytes Sample type
Acids/ anions F-, Cl-, Br-, NO2-, NO3-, ClO3-
SO42-, PO43-, formiate, acetate, oxalate
• Ultrapure water (UPW)
• UPW impinger for air samples
• Diluted aqueous samples
Bases/ cations NH4+, NH3, Li+, Na+, K+, Mg2+, Ca2+ • Ultrapure water (UPW)
• UPW impinger for air samples
• Diluted aqueous samples
Typical limits of quantitation
1 - 10 ng / L in UPW
0.01 - 0.05 μg / m³ in air

* LOQ can vary depending on sampling time and rate, impinger volume and enrichment factor. They will be adjusted corresponding to the project requirements.

Available laser-based particle counters are used for measuring the particle concentration in air and water. Our laser particle counters specifically designed for particle measurements in air or water can count and size particles as low as 0.1 μm in air and 50 nm in water respectively.

Analysis Analysis medium Measuring range
Particles UPW ≥ 0.05 μm
Particles air ≥ 0.1 μm

We offer our customers a reliable and competent service in a wide range of specialized chemical analytics.

  • Scientific advices and consultancy on chemical and technical issues with regard to contamination control
  • Task oriented process development according to customer requirements
  • Assistance in selecting cleanroom suitable materials and filter materials
  • Fast turnaround time for sample analysis according to customer needs
  • Qualified air and water sampling by trained laboratory staff
  • Solution-oriented and time / cost effective sampling and analysis program in order to minimize the impairment of production process
  • Preparation and delivery of sampling equipment or on-site sampling service
  • Customer training on-site in applying air sampling techniques and water sampling procedures
  • Test report including evaluation according to ITRS and SEMI
  • Quick response and fast support for contamination issues
  • M+W Products certification of VOC critical products and components
  • Outgassing evaluation according to CSM guidelines

On-line analyzers are generally used for analyzing gaseous media. They enable fast and continuous analysis with real-time response of airbone molecular contamination and provide results with high accuracy and precision. Using our online analyzers simplifies the test setup and sampling process and make enables an enormous time saving

Substance of interest Analysis Technique Measuring Range
SO2 / G2S / DMS UV Fluorescence 0.5 - 10,000 ppb
NO2 / NOX Chemiluminescence detector
Ozone UV Absorption
Organic compounds FID 0 - 10,000 mgC / m3


Filter test Installations

Our AMC-Team is equipped with several filter test rigs. Using high precision dosing options for gases and solvents like NOX, SO2 / H2S / DMS, HCI, NH3, ozone, siloxanes, toluene, xylene and IPA nearly any kind of contamination relevant to cleanrooms can be simulated. Our online measurement equipmentmeasures gas concentrazions, temperature, humidity, air flow rate as well as pressure drop.

Test Installation Analyses Specifics
Filter test installation

Test of AMC filters on

  • Filter effiency
  • Capacity
  • Life-Time
  • High precision dosage of serveral gaseous media and solvents
  • Online gas analyzers
  • Offline sampling by impinger and adsoption materials for analysis by ion chromatography and TD-GC/MS
Air banding units Testing of AMC filter materials on capacity in longterm testing
  • Outgassing tests of tool and ceiling filters as well as construction materials
  • AMC sampling by impinge and adsorption materials and analysis by ion chromatography and TD-GC/MS
Outgassing test installation AMC outgassing tests for filter materials