Rubén López Trigo
Head of Trace Analysis
Phone: +49 711 8804-1727
Mobil: +49 152 54749991
We offer several services in analyzing critical parameters and monitoring of ultrapure water systems. To ensure the high quality of analysis the Exyte Technology analysis area is linked to an in-house ultrapure water facility.
Our services in analysis of ultrapure water include:
The process and the product quality can be affected by contaminated rinsing water that contains different organic and inorganic contaminants. By integrating all technologies for water purification, the purity of water is upgraded to an ultra-high level by removing particles, organic and inorganic components as well as gases that are dissolved. The semiconductor industry requires increasingly stringent tolerance limits for contaminants in ultrapure water, especially for critical metals and TOC. This demands a carefully structured, analytical test program for critical parameters like ions, metals, particles, organic compounds and bacteria in order to ensure a high quality of UPW.
Our services include:
Polymer materials and components used in UPW distribution systems are potential sources of contamination that can negatively affect the water quality. For that purpose ultrahigh purity (UHP) polymer materials that are used within the production process have to fulfill precise SEMI standard specifications. Therefore, the pre-qualification of these materials is indispensable before they are used within UPW systems.
The following material testing procedures are provided by us: