Air Quality Monitoring

  • Cleanroom Technologies & Controlled Environments
Measurement of acids and bases via Ionenchromatogrphy
Measuring of adsorption tubes
Air Sampling via Impinger
Gaseous Media
Cleanroom for traceanalysis
Gas Chromatography system

Air Control for Environment, Health and Safety

Complex and special manufacturing processes in electronic and semiconductor industries require high cleanliness of ambient air. Chemical gas-phase contaminations, so-called airborne molecular contaminants (AMC), can form thin chemical films on critical surfaces. Stringent monitoring of indoor air quality enables to comply with high technology production environments.

Exyte Technology provides expertise in measuring, identifying and controlling air contamination. This enables our customers to improve their manufacturing processes as well as their product yields.

Dr. Yulia Dikikh
Head of Trace Analysis

Phone: +49 711 8804-1258

Mobil: +49 162 2114528

trace-analysis@exyte.net

The control of air in new cleanrooms and routine monitoring during the production process are essential tasks, in all fields where clean environments for production are required: semiconductor industry, optical and laser technology, pharmaceutical industry, medical technology, life science and food.

 Our portfolio includes:

  • Air sampling indoors, within makeup air units, recirculation systems, in mini environments and tools
  • Careful selection of the sampling points for root cause analysis if higher level of contamination is detected
  • Choice of appropriate sampling method
  • Assessment of purification measures (chemical filters)
  • Evaluation according to current international technology and customer specifications

Quality Control of Gaseous Media

Pure gases are used in many fabrication processes in the semiconductor, LED, flat panel and optical industry. They are used as purging gases for cleaning and setting up inert atmospheres, dilution and carrier gas, reaction gases and pneumatic drives. For most processes pure and ultrapure qualities are required.

Avoiding disastrous effects on product quality and process flow, high purity gases should be continuously analyzed and monitored.

Therefore, we offer:

  • Analysis of clean dry air (CDA), N2, He, Ar, CO2 and others
  • Advanced sampling procedure to handle higher pressure and flow
  • Sample collection of acids and bases by impinger method for ions chromatography (IC) and mass spectrometry (ICP-MS) analysis
  • Sample collection of organic compounds and refractories by sampling with adsorption materials (e.g. Tenax, CarboTrap) and TD-GC/MS analysis