Cleanroom ceiling / tool filters: ICF/PCF-series

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Cleanroom ceiling / tool filters: ICF/PCF-series

Impregnated Carbon / Pleated Carbon Filters

Flat filter type for air velocities up to max 1.5m/s.
Different models available with activated carbon or impregnated carbons for removal of acids, bases, condensables (VOC’s) and dopants, either standalone or with mixed functionality.

  • Very high capacity leading to a long useful filter life.
  • Low pressure drop leading to low energy consumption and operating cost.
  • Tested to the latest requirements of the demanding semiconductor industry.

Frank Hödle
Team Leader AMC Filter

Phone: +49 711 8804-2161

amc@exyte.net

Properties

  • Very high capacity leading to a long useful filter life.
  • Low pressure drop leading to low energy consumption and operating cost.
  • Tested to the latest requirements of the demanding semiconductor industry.