Cleanroom ceiling / tool filters: INX/PCF-series

Advanced Technology Facilities
Biopharma & Life Sciences

IoNeXchange / Pleated Carbon Filter

Flat filter type for air velocities up to max 1.5m/s.
Different models available with a combination of different filter media for removal of acids, bases, condensables (VOC’s) and dopants in one filter housing.

Very high capacity leading to a long useful filter life.
Low pressure drop leading to low energy consumption and operating cost.
Tested to the latest requirements of the demanding semiconductor industry.

Contact

Antonio Dennis Barbarossa
Product Manager AMC Filter

Mobil: +49 152 54803177

AntonioDennis.Barbarossa@exyte.net

Technical Data
Properties

Technical Data

Performance Parameters

Typ	Value
Filter medium	Anionexchanger, impregnated activated carbon
Removal method	Ion exchange Chemisorption/Physisorption
Frame material	Anodized aluminum
Dimensions (L×W×H)	800 × 485 × 220 mm
Weight	approx. 12 kg
Typical air flow rate	1,000 m³/h
Pressure drop (at typical air flow rate)	68 Pa
Inlet Air Conditions
Recommended temperature	≤ 40 °C
Recommended relative humidity	≥ 40 % r.H.

Properties

Very high capacity leading to a long useful filter life.
Low pressure drop leading to low energy consumption and operating cost.

Tested to the latest requirements of the demanding semiconductor industry.