Cleanroom ceiling / tool filters: INX-series

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Cleanroom ceiling / tool filters: INX-series

IoNeXchange filters

Flat filter type for air velocities up to max. 1.5m/s.
Different models available with various types of ion-exchangers for highly-effective removal of acids (INX-A) and bases (INX-B).

  • Very high capacity leading to a long useful filter life.
  • Extremely high removal efficiencies leading to best process protection.
  • Low pressure drop leading to low energy consumption and operating cost.
  • Tested to the latest requirements of the demanding semiconductor industry.

Frank Hödle
Team Leader AMC Filter

Phone: +49 711 8804-2161

amc@exyte.net

Technical Data

Performance Parameters
Typ Value
Filter medium Anionexchanger
Removal method Ion exchange
Frame material Anodized aluminum
Dimensions (L×W×H) 800 × 485 × 100 [mm]
Weight approx. 8 kg
Typical air flow rate 1,000 m³/h
Pressure drop (at typical air flow rate) 50 Pa
Inlet Air Conditions
Recommended temperature ≤ 40 °C
Recommended relative humidity ≥ 40 % r.H.

Properties

  • Very high capacity leading to a long useful filter life.
  • Extremely high removal efficiencies leading to best process protection.
  • Low pressure drop leading to low energy consumption and operating cost.
  • Tested to the latest requirements of the demanding semiconductor industry.