Cleanroom ceiling / tool filters: INX-series

Advanced Technology Facilities
Biopharma & Life Sciences

IoNeXchange filters

Flat filter type for air velocities up to max. 1.5m/s.
Different models available with various types of ion-exchangers for highly-effective removal of acids (INX-A) and bases (INX-B).

Very high capacity leading to a long useful filter life.
Extremely high removal efficiencies leading to best process protection.
Low pressure drop leading to low energy consumption and operating cost.
Tested to the latest requirements of the demanding semiconductor industry.

Contact

Antonio Dennis Barbarossa
Product Manager AMC Filter

Mobil: +49 152 54803177

AntonioDennis.Barbarossa@exyte.net

Technical Data
Properties

Technical Data

Performance Parameters

Typ	Value
Filter medium	Anionexchanger
Removal method	Ion exchange
Frame material	Anodized aluminum
Dimensions (L×W×H)	800 × 485 × 100 [mm]
Weight	approx. 8 kg
Typical air flow rate	1,000 m³/h
Pressure drop (at typical air flow rate)	50 Pa
Inlet Air Conditions
Recommended temperature	≤ 40 °C
Recommended relative humidity	≥ 40 % r.H.

Properties

Very high capacity leading to a long useful filter life.
Extremely high removal efficiencies leading to best process protection.

Low pressure drop leading to low energy consumption and operating cost.
Tested to the latest requirements of the demanding semiconductor industry.