Makeup and Return Air: IXV-series

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IoneXchange V-cell Filters

V-shape filter type for air velocities > 1.5m/s - 2.5m/s.
Different models available with various types of ion-exchangers for highly-effective removal of acids (IXV-A) and bases (IXV-B). In some cases also a mix with activated carbon materials make sense and can be offered on request.

  • Very high capacity leading to a long useful filter life.
  • Extremely high removal efficiencies leading to best process protection.
  • Low pressure drop leading to low energy consumption and operating cost.
  • Tested to the latest requirements of the demanding semiconductor industry.

Technical Data

Performance Parameters
Typ Value
Removal method Anionexchanger
Removal method Ion exchange
Frame material Polystyrene
Dimensions (L×W×H) 592 × 592 × 292 mm
Weight approx. 8 kg
Typical air flow rate 3,100 m³/h
Pressure drop 90 Pa
Inlet Air Conditions
Recommended temperature ≤ 40 °C
Recommended relative humidity ≥ 40 % r.H.

Properties

  • Very high capacity leading to a long useful filter life.
  • Extremely high removal efficiencies leading to best process protection.
  • Low pressure drop leading to low energy consumption and operating cost.
  • Tested to the latest requirements of the demanding semiconductor industry.
  • Filter fully incinerable which means easy disposal.