Head of Business Unit Controlled Environments
Phone: +49 711 8804-2079
Mobil: +49 172 8136092
Process tool availability becomes more and more an important tool characteristic to our customers. One main concern may be the quality of the process cooling water available in semiconductor fabs.
Exyte Technology´s solution is to separate the cooling circuits of fab and tool, and usage of Ultra-Pure-Water (UPW) in the tool circuit. This separation also enables a better control of the cooling water supply in regards to temperature stability, particle contamination, and flow rate which increases the tool perfomrance and availablity.