Precise Environmental Chamber

  • Advanced Technology Facilities
Precise Environmental Chamber

Innovative, very sensitive production processes, increasing quality standards and the fast progress in research and development present steady growing challenges to production and development environments in the semiconductor and optical industries as well as for nanotechnology and micromechanics.

Very low temperature and humidity tolerances, absolute cleanliness in regards to gaseous and particulate contamination as well as the shielding of acoustic, vibrational and electromagnetical influences to the customer's processes are the key factors for optimum production processes. Our solution: the MEC System (Modular Environmental Chamber)

  • Stable and reproducable process environments
  • Deposition of particulate and chemical contaminants
  • Precise temperature control
  • Acoustic shielding

Alexander Schopf
Head of Business Unit Controlled Environments

Phone: +49 711 8804-2079

Mobil: +49 172 8136092

alexander.schopf@exyte.net

Dr. Jens Tschmelak
Head of Business Unit Controlled Environments

Phone: +49 711 8804-2031

Mobil: +49 172 8610911

jens.tschmelak@exyte.net

Technical Data

Performance Parameters
Typ Value
Air volume flow 2.95 m³/h
Air temperature 22 °C
Temperature stability ± 5 mK down to ± 1 mK
Humidity 33 % r.H.
Humidity stability ± 0.3 % r.H.
Acoustic shielding for 100 < f < 5000 Hz: -15 dB
Magnetic shielding for 10 < f < 200 Hz: -30 dB

Properties

  • Stable and reproducable process environments
  • Deposition of particulate and chemical contaminants
  • Precise temperature control
  • Acoustic shielding